Flexible and Semi-Transparent Silicon Solar Cells as a Power
2.1. Device Structure and Fabrication. As it is schematically illustrated in Figure Figure1 1 a, the fabrication process of the flexible and semi-transparent silicon solar cells begins with growing a 400 nm thermal oxide (SiO 2) followed by low-pressure chemical vapor deposition (LPCVD) of 300 nm low-stress silicon nitride (Si x N y) on a (111) boron-doped single