Reduction of leakage currents in ferroelectric thin films by
be the causes of leakage current in HfO 2 thin films. Nowa-days, researchers have put forward a number of possible mechanisms to explain the reason behind leakage current in perovskite oxides thin films, including space-charge-limited current (SCLC), Schottky emission and so on (Nagaraj et al 1999, Chang and Lee 2002). However, in ferroelectric